Deposition Gases (SiH₄, TEOS, WF₆)

Deposition Gases (SiH₄, TEOS, WF₆) - CAS 7803-62-5, 78-10-4, 7783-82-6 - Chemical Product
Produit Dangereux
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Aperçu

Deposition Gases (SiH₄, TEOS, WF₆) for semiconductor thin film applications.

Numéro CAS

7803-62-5, 78-10-4, 7783-82-6

Formule Moléculaire

SiH₄, C₈H₂₀O₄Si, WF₆

Product Grade

Electronic Grade

Danger Class

CLASS 2

Gases

Apparence

gas

Formes de livraison

Canister

Description du Produit

Deposition Gases (SiH₄, TEOS, WF₆) are essential in the chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. These gases are used to form high-quality thin films in the electronics and semiconductor industry. They play a critical role in creating dielectric layers, silicon-based materials, and tungsten films, contributing to the performance and reliability of electronic devices.