Tungsten Hexafluoride (WF₆)
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Overview
Tungsten Hexafluoride (WF₆) for semiconductor processing.
CAS-Nummer
7783-82-6
Molekularformel
WF₆
Product Grade
Electronic Grade
Danger Class
CLASS 2
Gases
Appearance
gas
Lieferformen
Canister
Product Description
Tungsten Hexafluoride (WF₆) is a colorless, non-flammable gas used in the semiconductor industry. It serves as an etchant and chemical vapor deposition (CVD) precursor for depositing tungsten layers on silicon wafers. Key applications include interconnect formation in integrated circuits. Notable for its high purity and effectiveness in thin-film deposition processes.
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