Tungsten Hexafluoride (WF₆)

Tungsten Hexafluoride (WF₆) - CAS 7783-82-6 - Chemical Product
Hazardous Product
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Overview

Tungsten Hexafluoride (WF₆) for semiconductor processing.

CAS Number

7783-82-6

Molecular Formula

WF₆

Product Grade

Electronic Grade

Danger Class

CLASS 2

Gases

Appearance

gas

Delivery Forms

Canister

Product Description

Tungsten Hexafluoride (WF₆) is a colorless, non-flammable gas used in the semiconductor industry. It serves as an etchant and chemical vapor deposition (CVD) precursor for depositing tungsten layers on silicon wafers. Key applications include interconnect formation in integrated circuits. Notable for its high purity and effectiveness in thin-film deposition processes.