Tungsten Hexafluoride (WF₆)
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Aperçu
Tungsten Hexafluoride (WF₆) for semiconductor processing.
Numéro CAS
7783-82-6
Formule Moléculaire
WF₆
Product Grade
Electronic Grade
Danger Class
CLASS 2
Gases
Apparence
gas
Formes de livraison
Canister
Description du Produit
Tungsten Hexafluoride (WF₆) is a colorless, non-flammable gas used in the semiconductor industry. It serves as an etchant and chemical vapor deposition (CVD) precursor for depositing tungsten layers on silicon wafers. Key applications include interconnect formation in integrated circuits. Notable for its high purity and effectiveness in thin-film deposition processes.
Produits Connexes
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