Tungsten Hexafluoride (WF₆)
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Resumen
Tungsten Hexafluoride (WF₆) for semiconductor processing.
Número CAS
7783-82-6
Fórmula Molecular
WF₆
Product Grade
Electronic Grade
Danger Class
CLASS 2
Gases
Apariencia
gas
Formas de entrega
Canister
Descripción del Producto
Tungsten Hexafluoride (WF₆) is a colorless, non-flammable gas used in the semiconductor industry. It serves as an etchant and chemical vapor deposition (CVD) precursor for depositing tungsten layers on silicon wafers. Key applications include interconnect formation in integrated circuits. Notable for its high purity and effectiveness in thin-film deposition processes.
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