Tungsten Hexafluoride (WF₆)
المنتج الخطر
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شعار السعر
Overview
Tungsten Hexafluoride (WF₆) for semiconductor processing.
رقم CAS
7783-82-6
الصيغة الجزيئية
WF₆
درجة المنتج
Electronic Grade
فئة الخطر
CLASS 2
Gases
Appearance
gas
أشكال التسليم
Canister
وصف المنتج
Tungsten Hexafluoride (WF₆) is a colorless, non-flammable gas used in the semiconductor industry. It serves as an etchant and chemical vapor deposition (CVD) precursor for depositing tungsten layers on silicon wafers. Key applications include interconnect formation in integrated circuits. Notable for its high purity and effectiveness in thin-film deposition processes.
المنتجات ذات الصلة
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