Tungsten Hexafluoride (WF₆)
危险产品
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价格标语
Overview
Tungsten Hexafluoride (WF₆) for semiconductor processing.
CAS号
7783-82-6
分子式
WF₆
产品等级
Electronic Grade
危险等级
CLASS 2
Gases
Appearance
gas
包装形式
Canister
产品描述
Tungsten Hexafluoride (WF₆) is a colorless, non-flammable gas used in the semiconductor industry. It serves as an etchant and chemical vapor deposition (CVD) precursor for depositing tungsten layers on silicon wafers. Key applications include interconnect formation in integrated circuits. Notable for its high purity and effectiveness in thin-film deposition processes.
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