Bottom Anti-Reflective Coating (BARC)

Bottom Anti-Reflective Coating (BARC) is a specialized coating used in the semiconductor industry to improve the accuracy and resolution of photolithography processes. It effectively reduces light reflection from the substrate, leading to better pattern definition and critical dimension control. Key applications include advanced semiconductor manufacturing, where BARC plays a crucial role in achieving finer line widths and higher yields. Notable properties include excellent adhesion to various substrates and compatibility with photoresist materials.