Trimethylaluminum (TMA)

Trimethylaluminum (TMA) - CAS 75-24-1 - Chemical Product
المنتج الخطر
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شعار السعر

Overview

Trimethylaluminum (TMA) for high-k dielectric films in semiconductor manufacturing.

رقم CAS

75-24-1

الصيغة الجزيئية

Al2(CH3)6

درجة المنتج

Electronic Grade

فئة الخطر

CLASS 3

Flammable Liquids

Appearance

liquid

أشكال التسليم

Canister Drum

وصف المنتج

Trimethylaluminum (TMA) is a key precursor used in atomic layer deposition (ALD) processes. It is widely utilized in the electronics and semiconductor industry for the formation of high-k dielectric films. TMA offers excellent thermal stability and reactivity, making it suitable for precise and uniform film deposition.