Perfluorocyclobutane (c-C₄F₈)
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Overview
Perfluorocyclobutane (c-C₄F₈) for selective etching in semiconductor processes.
CAS-Nummer
115-25-3
Molekularformel
C4F8
Product Grade
Electronic Grade
Danger Class
CLASS 2
Gases
Appearance
gas
Lieferformen
Canister
Product Description
Perfluorocyclobutane (c-C₄F₈) is an electronic grade gas used primarily as an etchant in the semiconductor industry. It is known for its high selectivity and efficiency in etching processes, making it a preferred choice for creating fine patterns on silicon wafers. This product also serves as an overcharge protection additive and HF scavenger, enhancing the safety and performance of battery systems. Its key applications are found in the electronics and semiconductors sector, where its non-flammability and chemical stability are highly valued.
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