Perfluorocyclobutane (c-C₄F₈)
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Overview
Perfluorocyclobutane (c-C₄F₈) for selective etching in semiconductor processes.
CAS号
115-25-3
分子式
C4F8
产品等级
Electronic Grade
危险等级
CLASS 2
Gases
Appearance
gas
包装形式
Canister
产品描述
Perfluorocyclobutane (c-C₄F₈) is an electronic grade gas used primarily as an etchant in the semiconductor industry. It is known for its high selectivity and efficiency in etching processes, making it a preferred choice for creating fine patterns on silicon wafers. This product also serves as an overcharge protection additive and HF scavenger, enhancing the safety and performance of battery systems. Its key applications are found in the electronics and semiconductors sector, where its non-flammability and chemical stability are highly valued.