Perfluorocyclobutane (c-C₄F₈)

Perfluorocyclobutane (c-C₄F₈) - CAS 115-25-3 - Chemical Product
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Overview

Perfluorocyclobutane (c-C₄F₈) for selective etching in semiconductor processes.

CAS号

115-25-3

分子式

C4F8

产品等级

Electronic Grade

危险等级

CLASS 2

Gases

Appearance

gas

包装形式

Canister

产品描述

Perfluorocyclobutane (c-C₄F₈) is an electronic grade gas used primarily as an etchant in the semiconductor industry. It is known for its high selectivity and efficiency in etching processes, making it a preferred choice for creating fine patterns on silicon wafers. This product also serves as an overcharge protection additive and HF scavenger, enhancing the safety and performance of battery systems. Its key applications are found in the electronics and semiconductors sector, where its non-flammability and chemical stability are highly valued.