Perfluorocyclobutane (c-C₄F₈)

Perfluorocyclobutane (c-C₄F₈) - CAS 115-25-3 - Chemical Product
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Aperçu

Perfluorocyclobutane (c-C₄F₈) for selective etching in semiconductor processes.

Numéro CAS

115-25-3

Formule Moléculaire

C4F8

Product Grade

Electronic Grade

Danger Class

CLASS 2

Gases

Apparence

gas

Formes de livraison

Canister

Description du Produit

Perfluorocyclobutane (c-C₄F₈) is an electronic grade gas used primarily as an etchant in the semiconductor industry. It is known for its high selectivity and efficiency in etching processes, making it a preferred choice for creating fine patterns on silicon wafers. This product also serves as an overcharge protection additive and HF scavenger, enhancing the safety and performance of battery systems. Its key applications are found in the electronics and semiconductors sector, where its non-flammability and chemical stability are highly valued.