Perfluorocyclobutane (c-C₄F₈)

Perfluorocyclobutane (c-C₄F₈) - CAS 115-25-3 - Chemical Product
Hazardous Product
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Overview

Perfluorocyclobutane (c-C₄F₈) for selective etching in semiconductor processes.

CAS Number

115-25-3

Molecular Formula

C4F8

Product Grade

Electronic Grade

Danger Class

CLASS 2

Gases

Appearance

gas

Delivery Forms

Canister

Product Description

Perfluorocyclobutane (c-C₄F₈) is an electronic grade gas used primarily as an etchant in the semiconductor industry. It is known for its high selectivity and efficiency in etching processes, making it a preferred choice for creating fine patterns on silicon wafers. This product also serves as an overcharge protection additive and HF scavenger, enhancing the safety and performance of battery systems. Its key applications are found in the electronics and semiconductors sector, where its non-flammability and chemical stability are highly valued.