Nitrogen Trifluoride (NF₃)
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Overview
Nitrogen Trifluoride (NF₃) for semiconductor etching and chamber cleaning.
CAS-Nummer
7783-54-2
Molekularformel
NF3
Product Grade
Electronic Grade
Danger Class
CLASS 2
Gases
Appearance
gas
Lieferformen
Canister
Product Description
Nitrogen Trifluoride (NF₃) is a colorless, odorless, and non-flammable gas. It is primarily used in the electronics and semiconductor industry as an etchant and for chamber cleaning processes. NF₃ is valued for its high reactivity with silicon compounds, making it effective in removing deposits from process chambers without damaging sensitive equipment.
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