三氟化氮 (NF₃)
价格面议
价格面议
概述
Nitrogen Trifluoride (NF₃) for semiconductor etching and chamber cleaning.
产品描述
Nitrogen Trifluoride (NF₃) is a colorless, odorless, and non-flammable gas. It is primarily used in the electronics and semiconductor industry as an etchant and for chamber cleaning processes. NF₃ is valued for its high reactivity with silicon compounds, making it effective in removing deposits from process chambers without damaging sensitive equipment.