Nitrogen Trifluoride (NF₃)
危险产品
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价格标语
Overview
Nitrogen Trifluoride (NF₃) for semiconductor etching and chamber cleaning.
CAS号
7783-54-2
分子式
NF3
产品等级
Electronic Grade
危险等级
CLASS 2
Gases
Appearance
gas
包装形式
Canister
产品描述
Nitrogen Trifluoride (NF₃) is a colorless, odorless, and non-flammable gas. It is primarily used in the electronics and semiconductor industry as an etchant and for chamber cleaning processes. NF₃ is valued for its high reactivity with silicon compounds, making it effective in removing deposits from process chambers without damaging sensitive equipment.