Nitrogen Trifluoride (NF₃)
Produit Dangereux
Contact for Price
Price on request
Aperçu
Nitrogen Trifluoride (NF₃) for semiconductor etching and chamber cleaning.
Numéro CAS
7783-54-2
Formule Moléculaire
NF3
Product Grade
Electronic Grade
Danger Class
CLASS 2
Gases
Apparence
gas
Formes de livraison
Canister
Description du Produit
Nitrogen Trifluoride (NF₃) is a colorless, odorless, and non-flammable gas. It is primarily used in the electronics and semiconductor industry as an etchant and for chamber cleaning processes. NF₃ is valued for its high reactivity with silicon compounds, making it effective in removing deposits from process chambers without damaging sensitive equipment.
Produits Connexes
More products from Etch Gases in Electronic & Semiconductor Chemicals