Nitrogen Trifluoride (NF₃)

Nitrogen Trifluoride (NF₃) - CAS 7783-54-2 - Chemical Product
المنتج الخطر
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شعار السعر

Overview

Nitrogen Trifluoride (NF₃) for semiconductor etching and chamber cleaning.

رقم CAS

7783-54-2

الصيغة الجزيئية

NF3

درجة المنتج

Electronic Grade

فئة الخطر

CLASS 2

Gases

Appearance

gas

أشكال التسليم

Canister

وصف المنتج

Nitrogen Trifluoride (NF₃) is a colorless, odorless, and non-flammable gas. It is primarily used in the electronics and semiconductor industry as an etchant and for chamber cleaning processes. NF₃ is valued for its high reactivity with silicon compounds, making it effective in removing deposits from process chambers without damaging sensitive equipment.