Trifluoromethane (CHF₃, R23)
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Overview
Trifluoromethane (CHF₃, R23) for precise oxide etching in semiconductor manufacturing.
CAS-Nummer
75-46-7
Molekularformel
CHF₃
Product Grade
Electronic Grade
Danger Class
CLASS 2
Gases
Appearance
gas
Lieferformen
Canister Bulk
Product Description
Trifluoromethane (CHF₃, R23) is an electronic grade gas used primarily as an etchant in the electronics and semiconductor industry. It is particularly effective for oxide etching processes, contributing to the high precision required in chip fabrication. This gas is valued for its stability and selectivity, making it a preferred choice for advanced semiconductor applications.
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