Trifluoromethane (CHF₃, R23)

Trifluoromethane (CHF₃, R23) - CAS 75-46-7 - Chemical Product
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Resumen

Trifluoromethane (CHF₃, R23) for precise oxide etching in semiconductor manufacturing.

Número CAS

75-46-7

Fórmula Molecular

CHF₃

Product Grade

Electronic Grade

Danger Class

CLASS 2

Gases

Apariencia

gas

Formas de entrega

Canister Bulk

Descripción del Producto

Trifluoromethane (CHF₃, R23) is an electronic grade gas used primarily as an etchant in the electronics and semiconductor industry. It is particularly effective for oxide etching processes, contributing to the high precision required in chip fabrication. This gas is valued for its stability and selectivity, making it a preferred choice for advanced semiconductor applications.