Trimethylboron (TMB)
Gefährliches Produkt
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Overview
Trimethylboron (TMB) for advanced semiconductor manufacturing.
CAS-Nummer
54-96-6
Molekularformel
C3H9B
Product Grade
Electronic Grade
Danger Class
CLASS 3
Flammable Liquids
Appearance
gas
Lieferformen
Canister
Product Description
Trimethylboron (TMB) is a gas used as a p-type dopant in the semiconductor industry. It is primarily applied in Atomic Layer Deposition (ALD) processes to form high-quality thin films. TMB is favored for its ability to provide precise control over film thickness and composition, making it essential for the fabrication of next-generation electronic devices.