Tantalum Pentachloride (TaCl₅)

Tantalum Pentachloride (TaCl₅) - CAS 7721/2/6 - Chemical Product
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Overview

Tantalum Pentachloride (TaCl₅) for high-performance electronic applications.

CAS-Nummer

7721/2/6

Molekularformel

TaCl₅

Product Grade

Electronic Grade

Danger Class

CLASS 8

Corrosive Substances

Appearance

solid

Lieferformen

Canister Drum

Product Description

Tantalum Pentachloride (TaCl₅) is a key chemical used in the electronics and semiconductor industry. It serves as an essential precursor in Chemical Vapor Deposition (CVD) processes, contributing to the formation of high-quality dielectric layers. This compound is particularly valued for its ability to produce thin films with excellent uniformity and purity, making it indispensable in the manufacturing of advanced capacitors and other electronic components.