Tetrafluoromethane (CF₄)

Tetrafluoromethane (CF₄) - CAS 75-71-8 - Chemical Product
Hazardous Product
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Overview

Tetrafluoromethane (CF₄) for high-precision silicon etching in semiconductor manufacturing.

CAS Number

75-71-8

Molecular Formula

CF4

Product Grade

Electronic Grade

Danger Class

CLASS 2

Gases

Appearance

gas

Delivery Forms

Canister

Product Description

Tetrafluoromethane (CF₄) is an inert, colorless gas used primarily as an etchant in the electronics and semiconductor industry. It plays a critical role in the precise etching of silicon wafers, contributing to the production of integrated circuits and microelectronic devices. Besides its etching capabilities, CF₄ also serves as a dielectric agent, offering excellent electrical insulation properties. Its stability and non-flammability make it suitable for use in controlled environments where safety and performance are paramount.