Iodotrifluoromethane (CF₃I)

Iodotrifluoromethane (CF₃I) - CAS 2314-97-8 - Chemical Product
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Overview

Iodotrifluoromethane (CF₃I) is a low-damage etch gas for semiconductor processing.

CAS-Nummer

2314-97-8

Molekularformel

CF₃I

Product Grade

Electronic Grade

Danger Class

CLASS 2

Gases

Appearance

gas

Lieferformen

Canister

Product Description

Iodotrifluoromethane (CF₃I) is an electronic grade, low-damage etch gas used in the semiconductor industry. It is particularly valued for its ability to provide high selectivity and minimal damage during the etching process of silicon and other materials. This product is delivered in canisters and is essential for advanced semiconductor manufacturing, where precision and material integrity are critical.