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Electronic & Semiconductor Chemicals CVD/ALD Gases
CVD/ALD Gases
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Deposition Gases (SiH₄, TEOS, WF₆)
CAS: 7803-62-5, 78-10-4, 7783-82-6 SiH₄, C₈H₂₀O₄Si, WF₆
Electronic & Semiconductor Chemicals CVD/ALD Gases
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