Hexafluoroethane (C₂F₆)
Category: Electronic & Semiconductor Chemicals
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Overview
Hexafluoroethane (C₂F₆) for high-precision silicon etching in semiconductor manufacturing.
CAS Number
76-16-4
Molecular Formula
C₂F₆
Product Grade
Electronic Grade
Danger Class
Class 2
Appearance
gas
Packing & Delivery
Canister, Bulk
Product Description
Hexafluoroethane (C₂F₆) is an electronic grade gas used primarily as an etchant in the semiconductor industry. It is essential for creating fine patterns on silicon wafers during the fabrication of integrated circuits. This product is valued for its stability and effectiveness in plasma etching processes, contributing to the production of high-performance electronic devices. Its key properties include being non-flammable and having a low global warming potential compared to other fluorocarbons.